Types
Business Type
  • Business Type: Production and processing
  • Primary Business: Chip processing equipment, Chip separation equipment, Epitaxial wafers, Photonic crystal manufacturing equipment
LEDeXchange > Product > Epi/chip equip > Chip separation equipment > Macro Inspection IL C3400
Product price(US$) Location
$150000.00 Germany
Product issuing date：2017-03-02
Product valid date：Not limited

Macro Inspection IL C3400 Send inquiry

Manufacturer InnoLas Semiconductor GmbH

The Macro Inspection Tool is used in the Semiconductor industry to assess wafer surface quality macroscopically between individual process steps. Using two different illumination methods, the system can quickly detect a broad range of defects that are as small as a few microns in size.

The Macro Inspection Tool detects embedded defects and surface particles, scratches and cracks in layers, residues, or layer in-homogeneities and exposure defects. Advanced illumination techniques ensure an exceptional long lifetime of the illuminators, which guarantees a low cost of ownership.