Wafer Sorter IL 2600

IL 2600 wafer sorting system can automatically sort, split, merge and transfer wafers from any slot / cassette to any other slot / cassette in a six cassette array. Wafer sizes from 2” to 100mm and 100mm to 200mm can be handled in a single or multi-batch operation without the need of any mechanical adjustments. The laser mark code read for verification can be located at any position on the front and/or backside of the wafer.