Technology leaders utilize NEXX Systems' physical vapor deposition system, for backside metal and emerging LED markets.
The backside metallization process is a way to keep high power electronic devices cool. Apollo's Bernoulli wafer handling system moves thin wafers onto the wafer processing tray in an atmospheric environment.
Technology leaders in the emerging LED market are also considering using the Apollo in production because of its wafer handling architecture. Though processing up to twelve 4" wafers on a single tray, the physical vapor deposition system makes very high throughput possible.
