CHAD INDUSTRIES revealed its wafer-handling capabilities for Sapphire wafers

At the recent SemiconWest show in San Francisco in July,CHAD Industries exhibited its wafer-handling capabilities for Sapphire wafers used in the LED market.

It has adapted the standard WaferMate200 workcell to handle the smaller 2", 4", and 6" sapphire wafer requirements. The WaferMate200 workcell was tooled to handle 2" sapphire wafers and was loading and unloading a Veeco Instruments Inc. 3D non-contact ContourGT-X8 inspection tool during a live demonstration.

These capabilities can be available in process tools at different stages of manufacture and for different types of manufacture, such as metrology inspection and measurement, stud bumping, and solder bumping.

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