Currently, with the introduction of the new CRIUS II-L, which Aixtron considers as the world's largest capacity MOCVD reactor,the company sets a new benchmark for MOCVD reactor capacity, throughput and LED production cost.
the new Aixtron CRIUS II-L is based on the already market proven CRIUS II platform which was introduced in 2010,and it’s now available with a 16x4 inch or 69x2 inch capacity.
As with previous generations, the CRIUS II-L reactor is based on the Close Coupled Showerhead (CCS) concept, which as a key-enabling technology has a well proven track record in being easily scalable with a seamless and short process transfer.
