Aqualite Co. Ltd., a company based in Wuhan, China, has purchased three Close Coupled Showerhead (CCS) CRIUS MOCVD systems from AIXTRON AG, worldwide leading provider of deposition equipment to the semiconductor industry. It’s disclosed that the three CCS CRIUS systems were delivered in the 31x2 inch wafer configuration in the third and fourth quarter of 2008. Aqualite intends to utilize these reactors for the development and production of blue, green and white LED chips.
Mr. James Dong, CEO of Aqualite Co. Ltd., indicated that they have researched the market place to identify the best equipment to match their requirements for the volume production of LED chips. AIXTRON’s MOCVD tools were the ideal match in several respects. Features that they particularly favor include the process versatility, reproducibility and the wafer-to-wafer and run-to-run uniformity. They look forward to once again working closely with AIXTRON.