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2008-11-17

Tegal Receives Repeat Order for 901ACS System from Leading HB-LED Maker

Recently, Tegal Corporation, a leading designer and manufacturer of plasma etch and deposition systems used in the production of LEDs, MEMS, integrated circuits, and nanotechnology devices, announced that it received another follow-on order for an additional Tegal 901ACS unit from a leading opto-semiconductor / LED manufacturer.
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