2012-09-18

China’s IMR Orders AIXTRON System for Carbon Nanotube and Graphene Research

AIXTRON SE today announced a new BM system order from the Institute of Metal Research (IMR) at the Chinese Academy of Sciences. The contract is for a BM Pro PECVD system in a 4-inch wafer configuration, which will be dedicated to the production of carbon nanotubes and graphene. The order was placed in the first quarter of 2012 and the system will be delivered in the third quarter of 2012. AIXTRON’s local support team will install and commission the deposition system at the Institute’s state-of-the-art cleanroom facility. “We are ...
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