2012-12-07
Dynax Semiconductor Inc. of China has placed its first purchase order for an AIXTRON Close Coupled Showerhead (CCS) CRIUS MOCVD system aimed at production of nitride semiconductor electronic devices. It will be the first system in China dedicated to GaN electronics. The AIXTRON system will be used to grow GaN and related nitride semiconductor epitaxial layers on silicon carbide and silicon substrates for microwave and power devices. After installation and commissioning the system is now ready to produce high quality GaN epi-wafers. &ldq...
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