AIXTRON, a worldwide leading provider of deposition equipment to the semiconductor industry, announced today that Epileds, a leading supplier of LED chip products, has qualified the Company’s AIX R6 tool for LED epitaxy mass production.

AIXTRON, a worldwide leading provider of deposition equipment to the semiconductor industry, today presented its next generation MOCVD system at the China SSL international trade fair. The new AIX R6 has been designed for the production of LEDs based on Gallium Nitride (GaN) and can be delivered in 12x6-, 31x4-, 121x2-inch wafer configurations. Equipped with numerous technical innovations the new tool will lower operational costs significantly while simplifying usability and process control.