Apex Gas Mixing System-LEDinside

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2015-03-12

Leading Taiwanese Semiconductor Foundry Selects Veeco's Gas Mixing System

Veeco Instruments announced today that a leading Taiwanese semiconductor foundry has placed a repeat order for multiple Apex™ Gas Mixing Systems. The systems are expected to reduce germane (GeH4) purchase costs by up to 40% and increase yield for the foundry’s most advanced processes by delivering repeatable mixtures of GeH4 in hydrogen for silicon germanium epitaxy.

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