According to Oxford Instruments , it has sold its 400th plasma system to a Chinese HBLED supplier. Dan Ayres, Managing Director of Oxford Instruments Plasma Technology ,said that "It gives me a great sense of achievement to say that we have helped to enable the HBLED revolution.Our systems play a vital role in manufacturing HBLEDs, and we have served the industry as it has developed from its R&D roots into the global industry it is today.” Ayres continues, “We have been able to offer systems for high performance every step of the wa...

University of Magdeburg, Germany has placed an order for a PlasmaPro System100 ICP180 etch tool from UK-based Oxford Instruments plc. The university will utilize the system to run GaN on Si etch processes to facilitate its power semiconductor and HBLED research. GaN on Si offers a step change in technology for the HBLED and power semiconductor device markets. Through lower cost and larger diameter substrates the overall cost of devices can be dramatically reduced. Etching forms a vital part of the device manufacturing process and with the PlasmaPro100-...

It’s reported that Ultratech, Inc., a leading supplier of lithography and laser-processing systems used to manufacture semiconductor devices, announced it received a multiple-system order from U.S.-based SemiLEDs Corp., a leading supplier of high-brightness, laser-emitting diodes (HBLEDs).