2025-01-02

[News] HKUST Engineering Researchers Develop World’s First Deep-UV MicroLED Display Chips for Maskless Photolithography

In a breakthrough set to revolutionize the semiconductor industry, the School of Engineering of the Hong Kong University of Science and Technology (HKUST) has developed the world’s first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines. This enhanced efficiency UVC microLED has showcased the viability of a lowered cost maskless photolithography through the provision of adequate light output power density, enabling exposure of photoresist films in a shorter time. Conducted under the supervision of Prof. KWOK Hoi-S...
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