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2012-02-07

LG Siltron Orders Veeco MOCVD for Development of GaN-on-Silicon Wafer

South Korean epi wafer manufacturer LG Siltron has ordered Veeco’s TurboDisc® K465i™ gallium nitride (GaN) Metal Organic Chemical Vapor Deposition (MOCVD) System for production of gallium nitride on silicon (GaN-on-Si) wafers for power electronics and LED devices. Dr. Hee Bog Kang, General Manager of LG Siltron R&D, commented, “We are pleased to have chosen the TurboDisc K465i MOCVD System as our first GaN-on-Si production system. It offers unparalleled throughput advantages, and its TurboDisc technology prov...
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