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Home > Surfscan® SP3 Systems
2012-07-11

KLA-Tencor Announces Installation of First 450mm-Capable Surfscan® SP3 Systems

Unpatterned wafer defect inspection tools provide broad capability to enable critical infrastructure development Today KLA-Tencor Corporation (NASDAQ: KLAC) announced the installation of its first process control systems capable of handling and inspecting 450mm wafers: a new configuration of the market-leading Surfscan® SP3 platform called the Surfscan SP3 450. Fully automated, these unpatterned wafer inspection systems are designed to meet the demanding defect and surface quality characterization requirements of the 20nm node and beyond, enabling control of the...
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