2012-12-05
To Provide Manufacturers Greater Flexibility, Reduced Cost of Ownership and Improved Efficiency
KLA-Tencor Corporation (NASDAQ: KLAC) today announced its next-generation light-emitting diode (LED) patterned wafer inspection tool, the ICOS WI-2280. Designed specifically for defect inspection and 2D metrology for LED applications, the ICOS WI-2280 also provides enhanced inspection capabilities and increased flexibility for microelectromechanical systems (MEMS) and semiconductor wafers spanning two inches to eight inches in size.
The ICOS...
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