New tool detects electrical issues and small physical defects; helps optimize high-speed optical wafer inspection systems for preferential capture of yield-relevant defects KLA-Tencor Corporation (NASDAQ: KLAC) announced the eS805™, a new electron-beam inspection system for leading-edge chip manufacturers. Benefiting from more than twenty years of KLA-Tencor's e-beam inspection development and manufacturing expertise, the eS805 offers strong capability in detection of very small defects and defects that cause electrical problems in the integrated circuit, ...