The Sydney based clean-tech innovator BluGlass’s patent US2008272463, "Method and apparatus for growing a group (III) metal nitride film" has now been allowed in the U.S.
This patent brings its international patent portfolio up to 16 granted patents in key semiconductor markets including the U.S., Europe, Japan, Korea and China.
These patents help to provide the company with broad protection of its Remote Plasma Chemical Vapour Deposition (RPCVD) technology and underpin the commercial opportunities for BluGlass in the production of high efficiency semiconductor devices such as LEDs and solar cells.
BluGlass says its RPCVD technology has many advantages over conventional manufacturing technologies such as MOCVD. It is a lower temperature process which leads to potential performance and cost advantages in the production of LEDs and solar cells.
RPCVD vs MOCVD
In addition to the 16 granted patents, BluGlass now has 17 provisional patents in four patent families filed in key semiconductor manufacturing countries.
Additionally, BluGlass has recently lodged two additional patents through its joint venture EpiBlu. Apart from its JV, EpiBlu, the company also has a subsidiary, BluSolar, which is now exploring the process viability of RCPVD in photovoltaic (solar) applications.