Entegris Ships Gas Purification Systems Used in LED Manufacturing

Entegris, Inc. announced it shipped multiple Aeronex Gas Purification Systems to Lextar Electronics Corporation. Entegris' Aeronex systems are used in light emitting diode (LED) manufacturing to help ensure the desired brightness of the final LED device.

Lextar, a Taiwan-based manufacturer of super high-brightness LED (HBLED) products, is purchasing separate Aeronex gas purification systems for purifying nitrogen, hydrogen and ammonia used in the gallium nitride-based LED manufacturing process. The Aeronex systems remove a variety of contaminants including moisture and oxygen down to the parts-per-billion level from the process gases used during the metal organic chemical vapor deposition (MOCVD) process. The removal of these contaminants enhances the photoluminescence of the LED device.

Lextar is one of the world's top three manufacturers of thin film transistor liquid crystal display panels (TFT-LCD).

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