UK OIPT Developed NGP1000 HB-LED Plasma Production Tools

Oxford Instruments Plasma Technology (OIPT), a UK-based equipment maker, has launched the PlasmaPro NGP1000 HB-LED plasma production tools, which satisfies to the need of throughput with batch sizes from 61 x 2" wafers up to 7 x 6" wafers, coupled with high-quality device performance and yield for HB-LED manufacturing.

OIPT's PlasmaPro NGP1000 HB-LED plasma tool

It is capable of enhancing throughput, maximizing uptime and reducing cost of ownership through reliable hardware and ease of service.

In particular, the NGP1000 platform has been optimized for batch production, with a vacuum load-lock as standard. Open load and 4-sided cluster options are available.

What's more, it features the new 60MHz Viper plasma source, which achieves comparable plasma densities to ICP (inductively coupled plasma) sources, maintaining the benefits of high etch rates and low damage.

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