2024-08-09
Japanese researchers develop simplified EUV lithography systems to make future chips cheaper to produce
All of today’s most advanced lithography nodes utilise EUV (Extreme UltraViolet) technology. This technology is incredibly expensive, and is a major reason why the cost of high-end chip production has skyrocketed. Now, Professor Tsumoru Shintake of the Okinawa Institute of Science and Technology (OIST) has proposed a new, simplified EUV toolset that could make the production of future EUV chips much cheaper.
In essence, the OIST has created a...
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